1. Equipped with AGV, Auto Load/Unload Device 2. Intelligent control automatically download production reciipe and upload production data through barcode. 3. Independent control over chambers 4. 90% reduction of solvent deposition with Class #100 classification cleanliness. 5. Chember with rapid heating and cooling (Temperature uniformity ±3°C) 6. Environmental friendly with Nitrogen and Heat recycle
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