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Description
Microwave Plasma Etching System
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MACHINERY : KARDEX SHUTTLE
KARDEX MEGAMAT
KARDEX HORIZONTAL CAROUSEL
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Compact Ejectors : SCPLb / SCPLc
Electrical Compact Pump : GCPi
Vacuum Area Gripping Systems : FQE
Electric Vacuum Generator : ECBPMi
Compact Valves : LQEc / LQEi
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