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產品特色
1.Application field : IC substrate ，SLP， etc
2.Key technical indicators :
Throughput: 90 sides/h;
Resolution: Mini Line / space 6um/6um;
Alignment :±4um;
Interlayer alignment :8um；
Partition alignment :Yes;
Max exposure area :21inch*24inch
2.Key technical indicators :
Throughput: 90 sides/h;
Resolution: Mini Line / space 6um/6um;
Alignment :±4um;
Interlayer alignment :8um；
Partition alignment :Yes;
Max exposure area :21inch*24inch
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