Visual Inspection Equipment - CARIS-1100M

Hybrid Pattern AOI (2D + 3D)

2D Pattern Inspection
Resolution : 8 μm (Down To 2 μm)
Min. Line / Space Width : 40 μm (@8 μm)
16K Color Line Scan Camera / 4CH Color LED Illumination
AI Friendly Color Defect Image
Various Detection Algorithm (DRC, MDRC, MRC, SMI)

3D Metrology
White Light Interferometry
Z-Resolution : 50 nm

Measurement Repeatability
TOP : ±1.0 μm
BTM : ±1.5 μm

Measurement
Pattern Width / Pattern Thickness
Dimple Depth / Pad Diameter
Etc.

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