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產品特色
1. Equipped with AGV, Auto Load/Unload Device
2. Intelligent control automatically download production reciipe and upload production data through barcode.
3. Independent control over chambers
4. 90% reduction of solvent deposition with Class #100 classification cleanliness.
5. Chember with rapid heating and cooling (Temperature uniformity ±3°C)
6. Environmental friendly with Nitrogen and Heat recycle
2. Intelligent control automatically download production reciipe and upload production data through barcode.
3. Independent control over chambers
4. 90% reduction of solvent deposition with Class #100 classification cleanliness.
5. Chember with rapid heating and cooling (Temperature uniformity ±3°C)
6. Environmental friendly with Nitrogen and Heat recycle
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MACHINERY : KARDEX SHUTTLE
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Compact Ejectors : SCPLb / SCPLc
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