1、X-RAY pipe and detector can move along Z axis, can inspection defectless than 2.5um. 2、Can control objective table move speed across X-Y direction. 3、Editableinspection program,suitableforbulk goodsinspection. 4、Detectortilt maximum 60*, half-auto distinguish OK or NG product. 5、Large navigation window,can move objective table to specifiedlocation by click mouse. 6、Can accommodate any big size sample, allowing inspecting samplefrom special angle.
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