Inpulse 2HF9

Inpulse 2HF9 with insoluble anodes gives longest electrolyte lifetime and is proven in high
volume HDI production. The process offers a combined conveyorized metallization and plating
system. Inpulse 2HF9 enables filled BMV’s with less than 5 μm dimple. Inpulse 2 equipment
with Inpulse 2HF9 chemistry = one system from one supplier – One reliable, mass production
proven system from Atotech.

Features and benefits
‧ Good BMV filling performance
‧ Very good productivity with shortest production time
‧ Excellent planarity with low dimple
‧ Proven reliability by enabling horizontal wet to wet process flow and enabling good Cu
crystal structure
‧ Saves money by plating less copper onto the surface

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